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FA Systems

FOUP Loadport
TAS300 Type H1

FOUP Loadport
TAS300 Type H1 

Energy Savings Power Consumption Reduced 8% (entire clean room) Energy Savings Power Consumption Reduced 16% Effective Use of Resources Number of Components 9% Lighter
Restricted Chemical Substances RoHS Compliant        

Applications

Semiconductors

The FOUP opener (load port) creates a localized clean environment in a clean room. It offers low dust, high throughput, and high durability for repeated operation at the highest levels demanded for semiconductor production equipment.

Main Environmental Impact Reduction Effects

  1. By using a load port, electricity consumption in the entire clean room can be reduced by approximately 8%.
  2. Compared to earlier products (Type E4), power consumption is 16% lower.
  3. The number of mechanical components is reduced by 9%.

(Posted December 25, 2009)

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