TAS300 Type H1
|Power Consumption Reduced 8% (entire clean room)||Power Consumption Reduced 16%||Number of Components 9% Lighter|
The FOUP opener (load port) creates a localized clean environment in a clean room. It offers low dust, high throughput, and high durability for repeated operation at the highest levels demanded for semiconductor production equipment.
Main Environmental Impact Reduction Effects
- By using a load port, electricity consumption in the entire clean room can be reduced by approximately 8%.
- Compared to earlier products (Type E4), power consumption is 16% lower.
- The number of mechanical components is reduced by 9%.
(Posted December 25, 2009)